Description
Product Name | Platinum Coated Silicon Wafer | |
Product Code | NS6130-10-1179 | |
Diameter | 4” (101.6mm) | Confirm |
Coating | Platinum Coating | Confirm |
Crystal Orientation | <100> | Confirm |
Water Configuration | p-type Si + SiO2 + TiO2 + Pt | Confirm |
Surface roughness | ≤ 5 Å | Confirm |
Thickness of Platinum Layer | 150-200nm | Confirm |
Grade | Prime | Confirm |
Surface | Single Side Polished | Confirm |
Thickness of Si wafer | <500 μm | Confirm |
Resistivity | 1-10 Ω-cm | Confirm |
Crystal method | CZ | Confirm |
RRG | ≤12 % | Confirm |
Oxygen Contents | 12.5-16.5 ppma | Confirm |
Carbon Contents | ≤1 ppma | Confirm |
INSCX Thematic | Wafers |